Electron Microscopy and Analytical Techniques

Dr. Markus Döblinger

Winter Semester

13.00 – 15.00 h c.t., Willstätter HS


EXAM: 3.2.2016, 13.15-15.00 , Willstädter HS


This lecture is part of a two semester course. The main focus is Scanning Electron Microscopy (SEM) and related scanning techniques as well as analytical methods employed in electron microscopy. The  course in the summer semester ‘Introduction to Electron Microscopy’ mainly deals with Transmission Electron Microscopy (TEM) and Electron Diffraction.

Due to technical reasons the lecture script can be found here:



II.Electron sources, lenses & geometrical optics

III.Interactions  electron  beam –  matter

IV.Scanning electron microscopy (SEM): Samples, signals and detectors

V.Special SEM- based techniques

–Electron backscatter diffraction (EBSD)

–Focussed ion beam (FIB)

–Low vacuum SEM (LV SEM)

VI.Scanning transmission electron microscopy (STEM )

–Bright field (BF), Annular dark field (ADF)

–High angle annular dark field (HAADF)

VII.Analytical techniques / spectroscopy:

–Energy-dispersive X-ray spectroscopy (EDX)

–Wavelength-dispersive X-ray spectroscopy (WDX)

–Electron energy-loss spectroscopy (EELS)