Electron Microscopy and Analytical Techniques
Dr. Markus Döblinger
Winter Semester
13.00 – 15.00 h c.t., Willstätter HS
EXAM: 3.2.2016, 13.15-15.00 , Willstädter HS
This lecture is part of a two semester course. The main focus is Scanning Electron Microscopy (SEM) and related scanning techniques as well as analytical methods employed in electron microscopy. The course in the summer semester ‘Introduction to Electron Microscopy’ mainly deals with Transmission Electron Microscopy (TEM) and Electron Diffraction.
Due to technical reasons the lecture script can be found here:
Outline
I.Introduction
II.Electron sources, lenses & geometrical optics
III.Interactions electron beam – matter
IV.Scanning electron microscopy (SEM): Samples, signals and detectors
V.Special SEM- based techniques
–Electron backscatter diffraction (EBSD)
–Focussed ion beam (FIB)
–Low vacuum SEM (LV SEM)
VI.Scanning transmission electron microscopy (STEM )
–Bright field (BF), Annular dark field (ADF)
–High angle annular dark field (HAADF)
VII.Analytical techniques / spectroscopy:
–Energy-dispersive X-ray spectroscopy (EDX)
–Wavelength-dispersive X-ray spectroscopy (WDX)
–Electron energy-loss spectroscopy (EELS)